Process engineering analysis in semiconductor device fabrication / Stanley Middleman, Arthur K. Hochberg.
- New York, NY ; London : McGraw-Hill c1993
- 9780070418530 (pbk.)
- 0070418535 (pbk.)
- The material included in this text covers a range of processess in semiconductor device fabrication. The authors try to present traditional chemical engineering methodology in a non-traditional context. The text covers topics such as crystal growth and filtration.
Summary holdings does not include live availability details. Select a library name for the full Holdings display.
|Location of copy||Shelfmark||Online location||Holdings Notes|
|University of Bath Library: Level 3||621.38152 MID|
|British Library: Science, Technology and Industry, St Pancras Reading Rooms||RES (B) RL 71|
|British Library: Lending Collection||93/07606|
|University of Cambridge Libraries: University Library: South Front 5 follow signs to South Staircase, Fifth Floor||361:13.c.95.799|
|University of Cambridge Libraries: Cambridge University Library: Order to West Room, access from within the Main Reading Room, First Floor, (order to Rare Books Reading Room if pre-1850), not borrowable||1996.9.2128|
|University of Cambridge Libraries: West Hub Library: Open shelves||TK7871.85 .M53 1993|
|University of Glasgow Library: University Library Level 5||Engineering KR200 1993-M2|
|University of Leeds Library: Edward Boyle Library, level 11||Electrical Engineering J-5 MID|
|National Library of Scotland: General Reading Room, Edinburgh (stored offsite)||SPR2.94.393|
|National Library of Scotland: General Reading Room, Edinburgh (stored offsite)||SSL 621.38152 M584|
|National Library of Wales / Llyfrgell Genedlaethol Cymru: Contact the National Library of Wales / Llyfrgell Genedlaethol Cymru||PRINT 93MB5179|
|University of Oxford Libraries: Radcliffe Science Library||95.E00743 (Box B000000494623)|
|University of Oxford Libraries: Radcliffe Science Library||M94.E00907 (Box B000000494246)|
|University of Strathclyde Library: Standard Loan||MLD D 621.3815 MID|
|Trinity College Dublin Library: Hamilton Upper||621.38152 N31|
|Trinity College Dublin Library: Santry Book Repository||PL-258-754|
|UCL Library Services: UCL Science Library||ENGINEERING TE 51 MID|