Process engineering analysis in semiconductor device fabrication / Stanley Middleman, Arthur K. Hochberg.

Published
  • New York, NY ; London : McGraw-Hill c1993
Physical description
xvii, 774 p. : ill. ; 25 cm.
ISBN
  • 9780070418530 (pbk.)
  • 0070418535 (pbk.)
Notes
  • Includes bibliographical references and index.
Other names
Genre
  • Bibliography
  • Illustrated
  • text
Language
  • English

Summary

  • The material included in this text covers a range of processess in semiconductor device fabrication. The authors try to present traditional chemical engineering methodology in a non-traditional context. The text covers topics such as crystal growth and filtration.

Summary holdings does not include live availability details. Select a library name for the full Holdings display.

Location of copy Shelfmark Online location Holdings Notes
University of Bath Library: Level 3 621.38152 MID
British Library: Science, Technology and Industry, St Pancras Reading Rooms RES (B) RL 71
British Library: Lending Collection 93/07606
University of Cambridge Libraries: University Library: South Front 5 follow signs to South Staircase, Fifth Floor 361:13.c.95.799
University of Cambridge Libraries: Cambridge University Library: Order to West Room, access from within the Main Reading Room, First Floor, (order to Rare Books Reading Room if pre-1850), not borrowable 1996.9.2128
University of Cambridge Libraries: West Hub Library: Open shelves TK7871.85 .M53 1993
University of Glasgow Library: University Library Level 5 Engineering KR200 1993-M2
University of Leeds Library: Edward Boyle Library, level 11 Electrical Engineering J-5 MID
National Library of Scotland: General Reading Room, Edinburgh (stored offsite) SPR2.94.393
National Library of Scotland: General Reading Room, Edinburgh (stored offsite) SSL 621.38152 M584
National Library of Wales / Llyfrgell Genedlaethol Cymru: Contact the National Library of Wales / Llyfrgell Genedlaethol Cymru PRINT 93MB5179
University of Oxford Libraries: Radcliffe Science Library 95.E00743 (Box B000000494623)
University of Oxford Libraries: Radcliffe Science Library M94.E00907 (Box B000000494246)
University of Strathclyde Library: Standard Loan MLD D 621.3815 MID
Trinity College Dublin Library: Hamilton Upper 621.38152 N31
Trinity College Dublin Library: Santry Book Repository PL-258-754
UCL Library Services: UCL Science Library ENGINEERING TE 51 MID

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